Please use this identifier to cite or link to this item: http://hdl.handle.net/11400/10564
Title: Macroscopic and stochastic modeling approaches to pattern doubling by acid catalyzed cross-linking
Authors: Fuhrmann, Andreas
Πάτσης, Γεώργιος
Fiebach, Andre
Item type: Conference publication
Conference Item Type: Poster
Keywords: Diffusion;Διάχυση;Μακροσκοπικές προσεγγίσεις;Στοχαστικές προσεγγίσεις
Subjects: Technology
Electronics
Τεχνολογία
Ηλεκτρονική
Issue Date: 17-May-2015
21-Feb-2010
Abstract: Pattern doubling by cross-linking of a spacer triggered by residual acid diffusion from a previously developed primary structure into the spacer is a possible option to create structure widths below the nominal resolution of the optical process. An advantage of such a process step would be the self-alignment to the primary structure, which would render a second exposure step unnecessary. Using macroscopic and stochastic modeling approaches, we demonstrate that it may be possible to control the width of the secondary structure created by cross-linking by the amount of quencher base added.
Language: English
Citation: Fuhrmann, J., Fiebach, A. and Patsis, G. (2010) Macroscopic and stochastic modeling approaches to pattern doubling by acid catalyzed cross-linking. In Advances in Resist Materials and Processing Technology XXVII. 21st February 2010. San Jose
Conference: Advances in Resist Materials and Processing Technology XXVII
Access scheme: Embargo
License: Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες
URI: http://hdl.handle.net/11400/10564
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