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Title: Capacitive sensor arrays for the real time detection of volatile organic compounds
Authors: Πανταζής, Νίκος Α.
Πάτσης, Γεώργιος Π.
Βαλαμόντες, Ευάγγελος Σ.
Ράπτης, Ιωάννης Α.
Γουστουρίδης, Δημήτριος
Contributors: Σανοπούλου, Μερόπη
Item type: Conference publication
Conference Item Type: Poster
Keywords: capacitance;Gas sensor;Microfabrication;Polymer;Χωρητικότητα;Αισθητήρας αερίου;Μικροκατασκευαστική;Πολυμερές
Subjects: Technology
Electrical engineering
Ηλεκτρολογία Μηχανολογία
Issue Date: 18-May-2015
Publisher: IEEE
Abstract: Capacitive-type gas sensors rely on changes in the dielectric properties of the sensing polymeric layer due to absorption of Volatile Organic Compounds (VOCs) or moisture. They are promising devices in terms of ease and low cost of fabrication, reversibility and the wide range of sensing material choice. In the present work, the aim is to explore the fabrication issues of the InterDigitated Electrodes (IDE) through a generic simulation model for the prediction of the capacitance of various IDE structures. Based on the simulation results, an IDE layout was selected for the realization and evaluation of chemcapacitor arrays in the presence of different humidity levels and low concentrations of VOCs with dielectric constant close to those of polymers. The extracted results will be further exploited for the fabrication optimization of an InterDigitated Capacitor (IDC) layout with increased selectivity and sensitivity in specific applications.
Language: English
Citation: Pantazis, N.A., Patsis, G.P., Valamontes, E.S., Raptis, I.A., Goustouridis, D., et al. (2011) Capacitive sensor arrays for the real time detection of volatile organic compounds, In: Proceedings of the 5th International Conference on Sensing Technology, ICST 2011. Palmerston North, New Zealand. 28 Nov. - 1 Dec., 2011. [online]. p. 422-425, 6137013. Available from:
Conference: 5th International Conference on Sensing Technology, ICST 2011
Access scheme: Embargo
License: Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες
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