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Title: Polymer based chemical sensor array fabricated with conventional microelectronic processes
Authors: Κιτσαρά, Μαρία
Γουστουρίδης, Δημήτριος
Βαλαμόντες, Ευάγγελος Σ.
Οικονόμου, Πέτρος
Μπέλτσιος, Κωνσταντίνος Γ.
Contributors: Ράπτης, Ιωάννης Α.
Item type: Journal article
Keywords: Chemical sensors;Photolithography;Polymer deposition;Polymer swelling;Vapor sorption;Χημικοί αισθητήρες;Φωτολιθογραφία;Απόθεση πολυμερούς;Πολυμερές οίδημα;Προσρόφηση ατμών
Subjects: Technology
Electrical engineering
Ηλεκτρολογία Μηχανολογία
Issue Date: 18-May-2015
Abstract: A polymer array fabricated on the same substrate with conventional microelectronic processes is introduced for gas sensing applications. The process is based on photolithographic processes and takes advantage of the balance between UV exposure dose, material tone and developers used. The sensing properties of the lithographically defined films in the array were characterized for various analytes through in situ monitoring of films swelling by white light reflectance spectroscopy. The sensing responses are post processed by Principal Component Analysis and the discrimination between analytes with similar and totally different analytes is presented.
Language: English
Citation: KITSARA, M., GOUSTOURIDIS, D., VALAMONTES, E.S., OIKONOMOU, P., BELTSIOS, K.G., et al. (2010). Polymer based chemical sensor array fabricated with conventional microelectronic processes. Microelectronic Engineering. 12 (5). p. 1147-1152.
Journal: Journal of Optoelectronics and Advanced Materials
Type of Journal: With a review process (peer review)
Access scheme: Embargo
License: Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες
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