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Title: Ultra-miniaturized monolithically integrated polymer coated Si optoelectronic cantilevers for gas sensing applications
Authors: Μισιακός, Κωνσταντίνος
Ράπτης, Ιωάννης Α.
Γουστουρίδης, Δημήτριος
Κιτσαρά, Μαρία
Κοντοπανάγος, Χαράλαμπος Φ.
Contributors: Βαλαμόντες, Ευάγγελος Σ.
Gerardino, Annamaria
Item type: Conference publication
Conference Item Type: Poster
Keywords: Silicon;Polymer films;Organic compounds;Monolithic integrated circuits;Gas sensors;Πυρίτιο;Πολυμερές φιλμ;Οργανικές ενώσεις;Μονολιθικά ολοκληρωμένα κυκλώματα;Αισθητήρες φυσικού αερίου
Subjects: Technology
Electrical engineering
Ηλεκτρολογία Μηχανολογία
Issue Date: 18-May-2015
Publisher: IEEE
Abstract: The cantilever based devices relying on optical beam steering, even though sensitive as sensors, have rather limited penetration to the market. The obstacle that has prevented so far the wider spread of such devices is the inability to monolithically integrate the photonic components on the same die with the cantilever. In this work, a novel microsystem is presented comprising integrated Si light sources and detectors self aligned to suspended Si 3N4 cantilevers, acting as waveguides, all monolithically integrated in the same Si chip through conventional microelectronics processing. The cantilever is coated with a polymeric film that selectively absorbs analyte molecules from the environment causing a change in the film stress and commensurate cantilever's deflection which is monitored as change in the photocurrent. The PMMA coated device showed detection of VOCs, in a wide concentration range from few tens of ppm, limited only by the physicochemical properties and the chemical affinity of the polymer used.
Language: English
Citation: Misiakos, K., Raptis, I.A., Goustouridis, D., Kitsara, M., Contopanagos, H.F., et al. (2009) Ultra-miniaturized monolithically integrated polymer coated Si optoelectronic cantilevers for gas sensing applications, In: Proceedings of the IEEE Sensors 2009 Conference - SENSORS 2009. Christchurch, New Zealand. 25-28 October, 2009. [online]. p. 429-432, 5398260.
Conference: IEEE Sensors 2009 Conference - SENSORS 2009
Access scheme: Embargo
License: Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες
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