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Title: A CMOS compatible thermal accelerometer without solid proof mass, based on porous silicon thermal isolation
Authors: Γουστουρίδης, Δημήτριος
Καλτσάς, Γρηγόριος
Νασιοπούλου, Ανδρούλα Γ.
Item type: Conference publication
Conference Item Type: Poster
Keywords: Accelerometer;Porous silicon;Thermal sensor;Επιταχυνσιόμετρο;Πορώδες πυρίτιο;Θερμικός αισθητήρας
Subjects: Technology
Electrical engineering
Ηλεκτρολογία Μηχανολογία
Issue Date: 27-May-2015
Publisher: IEEE
Abstract: A Si thermal accelerometer without solid proof mass has been developed and characterized. The device is CMOS compatible and consists of a polysilicon heater and two thermopiles, situated symmetrically on each side of a heater. A thick porous silicon (PS) layer assures thermal isolation from the Si substrate. The operation principle is based on the movement induced thermal convection variations between the heater and the hot thermopile contacts, which is caused from the relative movement of the hot air on top of the heater to the sensor die. The Porous Silicon Thermal Accelerometer (PSTA) was tested in a specially designed vibration system for different frequencies and accelerations. In each case the response was compared to a commercial accelerometer. Appropriate read out electronics were fabricated in order to reduce the noise of the thermopiles and to amplify the signal. The dependence of the response on applied power and the surrounding environment was also studied.
Language: English
Citation: Goustouridis, D., Kaltsas, G. & Nassiopoulou, A.G. (2004) A CMOS compatible thermal accelerometer without solid proof mass, based on porous silicon thermal isolation, In: Proceedings of IEEE Sensors. Vienna, Austria. 24-27 October, 2004. [online] 2. p. 848-851, T3L-E.2. Available from:
Conference: IEEE Sensors 2004
Access scheme: Embargo
License: Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες
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