Please use this identifier to cite or link to this item: http://hdl.handle.net/11400/11278
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dc.contributor.authorΓουστουρίδης, Δημήτριοςell
dc.contributor.authorΚαλτσάς, Γρηγόριοςell
dc.contributor.authorΝασιοπούλου, Ανδρούλα Γ.ell
dc.date.accessioned2015-05-27T19:28:57Z-
dc.date.issued2015-05-27-
dc.date.issued2004-
dc.identifier.citationGoustouridis, D., Kaltsas, G. & Nassiopoulou, A.G. (2004) A CMOS compatible thermal accelerometer without solid proof mass, based on porous silicon thermal isolation, In: Proceedings of IEEE Sensors. Vienna, Austria. 24-27 October, 2004. [online] 2. p. 848-851, T3L-E.2. Available from: http://ieeexplore.ieee.org/eng
dc.identifier.urihttp://hdl.handle.net/11400/11278-
dc.description.abstractA Si thermal accelerometer without solid proof mass has been developed and characterized. The device is CMOS compatible and consists of a polysilicon heater and two thermopiles, situated symmetrically on each side of a heater. A thick porous silicon (PS) layer assures thermal isolation from the Si substrate. The operation principle is based on the movement induced thermal convection variations between the heater and the hot thermopile contacts, which is caused from the relative movement of the hot air on top of the heater to the sensor die. The Porous Silicon Thermal Accelerometer (PSTA) was tested in a specially designed vibration system for different frequencies and accelerations. In each case the response was compared to a commercial accelerometer. Appropriate read out electronics were fabricated in order to reduce the noise of the thermopiles and to amplify the signal. The dependence of the response on applied power and the surrounding environment was also studied.eng
dc.language.isoeng-
dc.publisherIEEEeng
dc.rightsΑναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες*
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/3.0/us/*
dc.sourcehttp://ieeexplore.ieee.org/en
dc.subjectAccelerometer-
dc.subjectPorous silicon-
dc.subjectThermal sensor-
dc.subjectΕπιταχυνσιόμετρο-
dc.subjectΠορώδες πυρίτιο-
dc.subjectΘερμικός αισθητήρας-
dc.titleA CMOS compatible thermal accelerometer without solid proof mass, based on porous silicon thermal isolationeng
dc.typeΔημοσίευση σε συνέδριο-
heal.classificationTechnology-
heal.classificationElectrical engineering-
heal.classificationΤεχνολογία-
heal.classificationΗλεκτρολογία Μηχανολογία-
heal.classificationURIhttp://id.loc.gov/authorities/subjects/sh85133147-
heal.classificationURIhttp://zbw.eu/stw/descriptor/18426-4-
heal.classificationURI**N/A**-Τεχνολογία-
heal.classificationURI**N/A**-Ηλεκτρολογία Μηχανολογία-
heal.identifier.secondaryDOI: 10.1109/ICSENS.2004.1426303-
heal.dateAvailable10000-01-01-
heal.accessembargo-
heal.fullTextAvailabilityfalse-
heal.conferenceNameIEEE Sensors 2004eng
heal.conferenceItemTypeposter-
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