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Title: Porous silicon membranes over cavity for efficient local thermal isolation in Si thermal sensors
Authors: Παγώνης, Δημήτριος-Νικόλαος
Νασσιοπούλου, Ανδρούλα Γ.
Καλτσάς, Γρηγόριος
Item type: Journal article
Keywords: Thermal isolation;Electrical isolation;Electrochemistry;Θερμική μόνωση;Ηλεκτρική μόνωση;Ηλεκτροχημεία
Subjects: Technology
Electrical engineering
Ηλεκτρολογία Μηχανολογία
Issue Date: 2-Jun-2015
Publisher: Electrochemical Society
Abstract: An improvement of porous silicon technology for local thermal isolation on bulk crystalline silicon is presented. The technique consists of forming an air cavity below the porous layer to increase the thermal isolation efficiency. Both porous silicon and the cavity underneath are formed during the same electrochemical process in two steps: in step 1 the current density used is below a critical value, and in step 2 it is switched to a value above the critical current for electropolishing. In this way, porous silicon is formed first, followed by the formation of the cavity underneath. Experimental results and simulations are shown together with an application of this process in a thermal silicon flow sensor.
Language: English
Citation: PAGONIS, D.-N., NASSIOPOULOU, A.G. & KALTSAS, G. (2004). Porous silicon membranes over cavity for efficient local thermal isolation in Si thermal sensors. Journal of the Electrochemical Society. [online] 151 (8). p. H174-H179. Available from:[Accessed 17/06/2004]
Journal: Journal of the Electrochemical Society
Type of Journal: With a review process (peer review)
Access scheme: Embargo
License: Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες
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