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Title: A novel microfabrication technology on organic substrates - Application to a thermal flow sensor
Authors: Καλτσάς, Γρηγόριος
Παγώνης, Δημήτριος-Νικόλαος
Πετρόπουλος, Α.
Τσουγένη, Κ.
Σπελιώτης, Τ
Contributors: Νασσιοπούλου, Ανδρούλα Γ.
Gogolides, E
Item type: Journal article
Subjects: Naval science (General)
Issue Date: 23-Sep-2014
Date of availability: 23-Sep-2014
Publisher: IOP Publishing Ltd
Abstract: Α new technology that allows the formation of thermal sensors on organic substrates by combining the standard PCB technology with the well established microelectronic techniques, is proposed. The obtained structures consist of low thermal conductivity material, therefore the heat dissipation to the substrate is minimized, which result to the enhancement of the device sensitivity and the improvement of the corresponding response time. The proposed technology exhibits a series of advantageous characteristics such as significant cost reduction, elimination of both wire-die bonding and die cutting, direct integration with electronics and potential expansion on flexible substrates. Furthermore, the final structure provides a planar surface, which allows for further lithographic steps to take place, but is also a major advantage for specific type of applications such as non-invasive flow measurements. In the context of the proposed technology, a thermal gas flow sensor was fabricated and tested in a specially designed experimental set-up. The sensor consisted of three thin Pt strips directly connected to the copper tracks of the organic substrate. The middle Pt resistor act as a heater while the other two serve as temperature sensing elements.
Language: English
Citation: G Kaltsas, A Petropoulos, K Tsougeni, D N Pagonis, T Speliotis, E Gogolides and A G Nassiopoulou. (2007). A novel microfabrication technology on organic substrates - Application to a thermal flow sensor. Journal of Physics: Conference Series. Vol 92, 1-4.
Journal: Journal of Physics: Conference Series
Type of Journal: With a review process (peer review)
Access scheme: Publicly accessible
License: Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες
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