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Title: A silicon thermal accelerometer without solid proof mass using porous silicon thermal isolation
Authors: Γουστουρίδης, Δημήτριος
Καλτσάς, Γρηγόριος
Νασσιοπούλου, Ανδρούλα Γ.
Item type: Journal article
Keywords: Porous silicon;Accelerometer;Επιταχυνσιόμετρο;Πορώδους πυρίτιο;Thermal sensor;Θερμικός αισθητήρας;Convection;Μεταγωγή
Subjects: Technology
Issue Date: 18-Mar-2015
Date of availability: 18-Mar-2015
Abstract: A Si thermal accelerometer without solid proof mass, based on porous silicon (PS) technology has been developed and characterized. The device is compatible with silicon technology and it consists of a polysilicon heater and two thermopiles, situated symmetrically on each side of a heater. A thick PS layer provides thermal isolation from the Si substrate. The operation principle is based on the movement induced thermal convection variations between the heater and the hot thermopile contacts, which are caused by the movement of the hot fluid medium on top of the heater with respect to the sensor die. A detailed simulation by the FEA package Ansys was carried out in order to find the optimum geometrical parameters and the theoretical device behavior. The porous silicon thermal accelerometer (PSTA) was tested in a specially designed vibration system for various frequencies and accelerations. Different packaging configurations were also evaluated for both air and oil surrounding environments. The dependence of the PSTA response on applied power was studied for each surrounding environment. In each case, the response was compared with a commercial reference accelerometer and the corresponding sensitivities were extracted.
Language: English
Journal: Sensors Journal, IEEE
Type of Journal: With a review process (peer review)
Access scheme: Publicly accessible
License: Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες
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