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Issue DateTitleAuthor(s)
2015-01-09; 2006Off-line metrology on SEM images using gray scale morphologyΖώης, Ηλίας Ν.; Ράπτης, Ιωάννης; Αναστασόπουλος, Βασίλειος
2015-05-17; 2010-05Detailed resist film modeling in stochastic lithography simulation for line-edge roughness quantificationΠάτσης, Γεώργιος; Δρυγιαννάκης, Δ.; Ράπτης, Ιωάννης
2015-05-16; 2010-02-21Modeling of double patterning interactions in litho-cure-litho-etch (LCLE) processesΠάτσης, Γεώργιος; Erdmann, Andreas; Shao, Feng; Fuhrmann, Juergen; Fiebach, Andre
2015-05-17; 2008-01Molecular weight and processing effects on the dissolution properties of thin poly(methyl methacrylate) filmsΚοκκίνης, Α.; Βαλαμόντες, Ευάγγελος Σ.; Γουστουρίδης, Δημήτριος; Γκανέτσος, Θεόδωρος; Μπέλτσιος, Κωνσταντίνος Γ.
2015-05-18; 2006-03-24Integrated simulation of line-edge roughness (LER) effects on sub-65nm transistor operationΠάτσης, Γεώργιος; Κωνσταντούδης, Βασίλειος; Γογγολίδης, Ευάγγελος
2015-05-18; 2005Fractal roughness of polymers after lithographic processingΚωνσταντούδης, Βασίλειος; Γογγολίδης, Ευάγγελος; Πάτσης, Γεώργιος Π.; Σαρρής, Βασίλειος; Τσερέπη, Αγγελική Δ.
2015-05-17; 2007-02-25Simulation of the combined effects of polymer size, acid diffusion length, and EUV secondary electron blur on resist line-edge roughnessΔρυγιαννάκης, Δ.; Nijkerk, M. D.; Πάτσης, Γεώργιος; Κόκκορης, Γ.; Ράπτης, Ιωάννης
2015-05-17; 2007-02-25Stochastic simulation of material and process effects on the patterning of complex layoutsΤσικρικάς, Ν.; Δρυγιαννάκης, Δ.; Πάτσης, Γεώργιος; Κόκκορης, Γεώργιος; Ράπτης, Ιωάννης
2015-05-18; 2006-01-18Effects of lithography non-uniformity on device electrical behaviorΠάτσης, Γεώργιος; Κωνσταντούδης, Βασίλειος; Γογγολίδης, Ευάγγελος
2015-05-18; 2003-01Etching behavior of Si-containing polymers as resist materials for bilayer lithographyΤσερέπη, Αγγελική Δ.; Κορδογιάννης, Γεώργιος; Πάτσης, Γεώργιος Π.; Κωνσταντούδης, Βασίλειος; Γογγολίδης, Ευάγγελος