Search
Add filters:
Use filters to refine the search results.
Results 1-2 of 2 (Search time: 0.001 seconds).
- previous
- 1
- next
Item hits:
Issue Date | Title | Author(s) |
---|---|---|
2015-05-19; 2004-02-22 | Toward a complete description of linewidth roughness | Κωνσταντούδης, Βασίλειος; Πάτσης, Γεώργιος; Leunissen, Leonardus H. A.; Γογγολίδης, Ευάγγελος |
2015-05-20; 2004-08-17 | Line edge roughness and critical dimension variation | Κωνσταντούδης, Βασίλειος; Πάτσης, Γεώργιος; Γογγολίδης, Ευάγγελος; Leunissen, Leonardus H. A. |
Discover
Subject
Date issued
- 2 2015