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Title: A novel microfabrication technology on organic substrates
Alternative title / Subtitle: application to a thermal flow sensor
Authors: Καλτσάς, Γρηγόριος
Πετρόπουλος, Α.
Τσουγένη, Κ.
Παγώνης, Δ. Ν.
Σπηλιώτης, Τ.
Contributors: Γογγολίδης, Ε.
Νασσιοπούλου, Ανδρούλα Γ.
Item type: Journal article
Keywords: Μικροβιομηχανική τεχνολογία;Οργανικά υποστρώματα;Αισθητήρας θερμικής ροής;Διάταξη διαδικασίας;Microfabrication technology;Organic substrates;Thermal flow sensor;Process layout
Subjects: Technology
Electrical engineering
Ηλεκτρολογία Μηχανολογία
Issue Date: 28-Apr-2015
Date of availability: 28-Apr-2015
Abstract: Α new technology that allows the formation of thermal sensors on organic substrates by combining the standard PCB technology with the well established microelectronic techniques, is proposed. The obtained structures consist of low thermal conductivity material, therefore the heat dissipation to the substrate is minimized, which result to the enhancement of the device sensitivity and the improvement of the corresponding response time. The proposed technology exhibits a series of advantageous characteristics such as significant cost reduction, elimination of both wire-die bonding and die cutting, direct integration with electronics and potential expansion on flexible substrates. Furthermore, the final structure provides a planar surface, which allows for further lithographic steps to take place, but is also a major advantage for specific type of applications such as non-invasive flow measurements. In the context of the proposed technology, a thermal gas flow sensor was fabricated and tested in a specially designed experimental set-up. The sensor consisted of three thin Pt strips directly connected to the copper tracks of the organic substrate. The middle Pt resistor act as a heater while the other two serve as temperature sensing elements.
Description: PHONONS 2007
IOP Publishing
Conference series 9
Language: English
Citation: Kaltsas, G., Petropoulos, A., Tsougeni, K., Pagonis, D.N., Speliotis, T. e.t. (2007) A novel microfabrication technology on organic substrates: application to a thermal flow sensor. Journal of physics, (92). pp.1-4.
Journal: Journal of physics
Type of Journal: With a review process (peer review)
Access scheme: Publicly accessible
License: Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες
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