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Title: Pyrolytic laser-based chemical vapour deposition of TIC coatings
Authors: Ζεργιώτη, Ιωάννα
Χατζηαποστόλου, Αντώνιος
Χοντζόπουλος, Ε.
Χαϊδεμενόπουλος, Γρηγόρης Ν.
Ζερβάκη, Άννα
Item type: Journal article
Keywords: Carbides;Chemical vapour deposition;Deposition process;Titanium carbide;Καρβίδια;Χημική εναπόθεση ατμών;Διεργασία εναπόθεσης;Καρβίδιο τιτανίου
Subjects: Technology
Issue Date: 3-May-2015
Date of availability: 3-May-2015
Publisher: Elsevier
Abstract: Tic layers have been successfully deposited locally on D2 tool steel specimens and miniature industrial tools with the aim to improve their mechanical and chemical surface properties. The deposition process was based on a pyrolytically-induced chemical reaction of Tick, and CC& compounds combined with an atomic hydrogen source. Local heating of the substrate was achieved by means of a 100 W COz laser controlled by a microcomputer-based feedback loop system, involving on-line substrate temperature monitoring. Scanning electron microscopy, energy-dispersive X-ray analysis, X-ray diffraction, and transmission electron microscopy analysis showed that close-stoichiometric Tic (fee structure, lattice constant a =4.2 A) was deposited in the films with a nanocrystalline structure. The microhardness of the coatings was in the range 2500-3200 HK.
Language: English
Citation: ZERGIOTI, I., HATZIAPOSTOLOU, A., HONTZOPOULOS, E., HAIDEMENOPOULOS, G.N. & ZERVAKI, A. (1995). Pyrolytic laser-based chemical vapour deposition of TIC coatings. Thin Solid Films. [Online] 271(1-2), p.96-100. Available from:[Accessed 04/02/2000]
Journal: Thin Solid Films
Type of Journal: With a review process (peer review)
Access scheme: Publicly accessible
License: Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες
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